| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an ultrasonic joining apparatus maintaining stable joining quality without a deterioration in vibration transmission even if bonding is repeated. <P>SOLUTION: A bonding tool 30 is brought into contact with a component P on the other principal plane. The component P has a metal joint P1 formed on one of principal planes, and a smooth surface formed on the other principal plane. Pressurizing force and ultrasonic vibration are applied to the component P to join the metal joint P1 with a surface B to be joined. A contact surface 31 with the component of the bonding tool is made into a smooth surface, and in addition fine particles 33 made of the same material as that of the component P with a particle diameter of 10-100 nm are dispersively attached to the contact surface 31. Intermolecular force working between the particles 33 and the component P improves vibration transmission from the bonding tool 30 to the component P and improves joint quality. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
