| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wafer-carrying controller enabling a diversion and an appropriation to a similar system without reconsidering each control processing and changing an information structure even when a part to be controlled is altered. <P>SOLUTION: The wafer-carrying controller 1 is provided around a command memory 2 with an on-line host communication processor 3, a carrying-sequence processor 4, a GUI processor 5, a carrier-control processor 6, a carrying-robot control processor 7, an I/O control processor 8, a carrier-command translation table 9, a robot-command translation table 10, a teaching-point translation table 11, and an I/O map translation table 12. Each of the processors 3 to 8 is made independent mutually and an information is transferred only to the common memory 2. The carrying section of a semiconductor manufacturing apparatus is modelled, and a general-purpose information and the information structure are formed on the common memory 2 on the basis of the model. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
