| 摘要 |
PROBLEM TO BE SOLVED: To make the temperature of a substrate follow up the temperature of a plate by improving the efficiency of heat transmission between the substrate and plate. SOLUTION: A temperature controller is equipped with the plate 2 and a temperature control unit 4. The temperature control unit 4 has a thermoelectric module 42, and a water cooling jacket which is brought into contact with the plate 2 across the thermoelectric module 42. The plate 2 is provided with a projection 12 for supporting a body 1 to be processed on the surface on the opposite side from the surface 21 that the thermoelectric module 42 comes into contact with. When the body 1 to be processed is supported by the projection 12 and mounted on the surface 21 of the plate 2, a gap 11 of about 100μm is formed between the body 1 to be processed and the surface 21 of the plate 2. Further, a heat conduction layer 3 accelerating heat conduction is formed on the surface 21. The heat conduction layer 3 is, for example, a nano-particle porous layer. COPYRIGHT: (C)2006,JPO&NCIPI
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