| 摘要 |
PROBLEM TO BE SOLVED: To provide an airtight sealing inspection method which can be applied to any gap in vacuum airtightness, atmospheric airtightness, and pressurized airtightness regardless of the size of an object to be inspected and the presence of heat resistance, allows measurement in a short time to the second, and can be easily incorporated into a production line. SOLUTION: The airtight sealing inspection method performs airtight sealing inspection for a multilayer structure such as double glazing, a vacuum cup, and a multilayer diffraction optical element and a vacuum pack packed airtightly with heat seal by obtaining interference fringes on the surface of the object to be inspected and observing a change in the interference fringes caused by pressurization and depressurization. COPYRIGHT: (C)2006,JPO&NCIPI
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