| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement detector capable of accurately detecting displacement without affection from an outside electromagnetic field. SOLUTION: A probe 23 being fixed to a spring 22 and having a tip ball 232 at the other end and a displacement detection optical system 24 for optically detecting the deformation of an Eden spring 22 are provided. A reflection mirror 226 is provided to the Eden spring 22. When the tip ball 232 contacting the surface W to be measured is displaced vertically, the Eden spring is deformed, the orientation of the reflection mirror 226 is changed, and the reflection light detected by the displacement detection optical system 24 is also changed. From the change in the reflection light, the displacement of the tip ball 232 is detected. Since the displacement detection is performed based on a physical phenomenon of the deformation of the Eden spring 22 and an optical phenomenon of the light reflection by the reflection mirror 226, it is not affected from outside electromagnetic field. COPYRIGHT: (C)2006,JPO&NCIPI
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