发明名称 Semiconductor device including a trench-type metal-insulator-metal (MIM) capacitor and method of fabricating the same
摘要 In a semiconductor device, and a method of fabricating the same, the semiconductor device includes a bottom electrode and a first interconnection layer on a semiconductor substrate, an upper surface of the bottom electrode and an upper surface of the first interconnection layer being level, an interlayer insulating layer having a trench exposing the upper surface of the bottom electrode and a via hole exposing the upper surface of the first interconnection layer, a contact plug formed of a first material inside the via hole and connected to the first interconnection layer, an upper electrode formed of a second material inside the trench on the bottom electrode, the first material being exclusive of the second material, and a dielectric layer interposed between the bottom electrode and the upper electrode, and formed only inside the trench.
申请公布号 US2006006441(A1) 申请公布日期 2006.01.12
申请号 US20050099678 申请日期 2005.04.06
申请人 PARK DUK-SEO;PARK HYUNG-MOO 发明人 PARK DUK-SEO;PARK HYUNG-MOO
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
代理机构 代理人
主权项
地址