METHOD OF FORMING METAL LINE FOR DIMINISHING CROOKING OF PLUG INDUCED FROM AGGLOMERATION OF METAL SILICIDE,申请号KR19990058888-传众专利搜索

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发明名称	METHOD OF FORMING METAL LINE FOR DIMINISHING CROOKING OF PLUG INDUCED FROM AGGLOMERATION OF METAL SILICIDE
摘要
申请公布号	KR100541672(B1)	申请公布日期	2006.01.12
申请号	KR19990058888	申请日期	1999.12.18
申请人		发明人
分类号	H01L21/283	主分类号	H01L21/283
代理机构		代理人
主权项
地址

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