Apparatus and method of applying resist,申请号KR19990051561-传众专利搜索

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发明名称	Apparatus and method of applying resist
摘要
申请公布号	KR100542499(B1)	申请公布日期	2006.01.12
申请号	KR19990051561	申请日期	1999.11.19
申请人		发明人
分类号	B05D1/40;B05C5/00;B05C11/08;G03F7/16;H01L21/027	主分类号	B05D1/40
代理机构		代理人
主权项
地址

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