| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small pressure regulating microvalve manufactured by using semiconductor processing technology with a semiconductor wafer as a material, and to provide a fuel cell mounted therewith. <P>SOLUTION: The pressure regulating microvalve manufactured by using the semiconductor wafer comprises a flow path 033 connecting a gas inlet 031 and a gas outlet 032, a valve element 025 provided in the flow path 033, and a diaphragm 024 connected to the valve element 025 via a valve stem 023. The diaphragm 024 is arranged in a space between an inside 034 and an outside 035 of the flow path 033. The flow path 033 is deformed with a pressure difference between the inside 034 and the outside 035 to cause the displacement of the valve element 025, whereby the microvalve is opened/closed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
