| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a setter by which deformation such as warp occurring on a ceramic substrate after fired is suppressed, and a method of manufacturing the ceramic substrate. <P>SOLUTION: The deformation such as warp occurring on the piezoelectric ceramic substrate after fired is suppressed by placing and firing a ceramic green 1 on the placing surface 2a of the zirconia setter 2 having 0.3-2.5 μm average particle diameter, ≥6 kg/dm<SP>3</SP>ceramic density, ≤5 W/mK heat conductivity and 1-20 μm center line average surface roughness of the placing surface 2a. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
