| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature detecting apparatus capable of performing non-contact detection of the temperature of each object to be inspected, and to provide a temperature controller capable of controlling the temperature of the object to be inspected at a desired temperature on the basis of this detection result. SOLUTION: This temperature controller 100 has a vacuum chamber wherein a front substrate and a rear substrate are counterposed and housed. In the vacuum chamber, an upper heater 32 for the front substrate and a lower heater 34 for the rear substrate are arranged. When the temperature of each substrate is controlled, first of all, marks of the substrate are detected with a camera 38 from outside the vacuum chamber, and the distance between each mark and the next is computed in an operation part 42. The operation part 42 compares the computed distance with a reference value stored beforehand in a storage portion 44, and computes the temperature of the substrate on the basis of the thermal expansion coefficient of the substrate. Moreover, a control unit 40 controls the upper heater 32 and the lower heater 34 on the basis of computation results, and controls the temperature of the front substrate and the rear substrate uniformly. COPYRIGHT: (C)2006,JPO&NCIPI
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