发明名称 |
Wedge shaped uniform energy megasonic transducer |
摘要 |
A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise two or more piezoelectric crystal segments that are separately controllable with respect to power and/or time. When assembled, the two more piezoelectric crystal segments give the acoustic energy generating means a rectangular shape, a wedge shape or a triangle shape. The resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.
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申请公布号 |
US2006006766(A1) |
申请公布日期 |
2006.01.12 |
申请号 |
US20050228600 |
申请日期 |
2005.09.16 |
申请人 |
PRODUCT SYSTEMS INCORPORATED |
发明人 |
BECK MARK J.;VENNERBECK RICHARD B.;LILLARD RAYMOND Y.;LIEBSCHER ERIC G. |
分类号 |
B08B3/12;H01L41/04;G10K11/32;H01L21/304;H01L25/00;H04R1/34;H04R23/00 |
主分类号 |
B08B3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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