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发明名称
SCANNING EXPOSURE METHOD AND CIRCUIT ELEMENT PRODUCING METHOD EMPLOYING THE SAME
摘要
申请公布号
KR100544032(B1)
申请公布日期
2006.01.11
申请号
KR20010049558
申请日期
2001.08.17
申请人
NIKON CORPORATION
发明人
MAGOME NOBUTAKA
分类号
G03F9/00;H01L21/027;G03F7/20
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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