Method and apparatus for testing or inspection of articles

摘要

The method involves acquiring a number of images of an object, especially of the same area of the object, with at least one but preferably more acquisition units, preferably an electron-optical unit, and evaluating the images with the so-called blob-labeling algorithm and a quality or characteristic function. Quality or characteristic measures are produced for image evaluation or assessment. The method involves acquiring a number of images of an object, especially of the same area of the object, with at least one but preferably more acquisition units, preferably an electron-optical unit and evaluating the images with the so-called blob-labeling algorithm. Image characteristics are extracted using at least one extraction function (E1-Em) and characteristic images (M1-Mm) produced, especially while maintaining the image structure. Binary function values are computed and a binary image (B) generated. A label image (L) is produced by a blob-labeling algorithm, function images (V') are derived from the characteristic images, a quality or characteristic function (F) is used for image points obtained from the label and function images and quality or characteristic measures derived for evaluation. Independent claims are also included for the following: an arrangement for testing or examining objects.