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发明名称
FLUID HANDLING COMPONENT WITH ULTRAPHOBIC SURFACES
摘要
申请公布号
EP1613866(A2)
申请公布日期
2006.01.11
申请号
EP20040759559
申请日期
2004.04.15
申请人
ENTEGRIS, INC.
发明人
EXTRAND, CHARLES, W.
分类号
B01L3/00;B01L9/00;B01L99/00;F15D1/06;H01L21/673;(IPC1-7):F15D1/02
主分类号
B01L3/00
代理机构
代理人
主权项
地址
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