sub-wavelength aperture-size near-field optical probe using isotropic etching technique,申请号KR20030011321-传众专利搜索

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发明名称	sub-wavelength aperture-size near-field optical probe using isotropic etching technique
摘要
申请公布号	KR100542867(B1)	申请公布日期	2006.01.11
申请号	KR20030011321	申请日期	2003.02.24
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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