METHOD FOR FABRICATING DIELECTRIC LAYER,申请号KR20030027511-传众专利搜索

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发明名称	METHOD FOR FABRICATING DIELECTRIC LAYER
摘要
申请公布号	KR100541675(B1)	申请公布日期	2006.01.11
申请号	KR20030027511	申请日期	2003.04.30
申请人		发明人
分类号	H01L21/20;H01L21/318;C23C16/02;C23C16/34;C23C16/56;H01L21/306;H01L21/314;H01L29/51;H01L29/78	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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