Batch-type deposition apparatus having a gland portion,申请号KR20040005866-传众专利搜索

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发明名称	Batch-type deposition apparatus having a gland portion
摘要
申请公布号	KR100541559(B1)	申请公布日期	2006.01.11
申请号	KR20040005866	申请日期	2004.01.29
申请人		发明人
分类号	H01L21/205;C23C16/00;C23C16/40;C23C16/44;C23C16/455;C23C16/458	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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