Apparatus and method for robotic alignment of substrates

摘要

The disclosure relates to a robot device (112) that either translationally or rotationally aligns a substrate (150) with a slot (174). For translational alignment, the robot device comprises a position sensor positioned in close proximity to the slot. The translational position sensor (170) determines the position of the object by moving the object parallel to the slot until it actuates the position sensor. For rotational alignment, two position sensors (140ba, 140bb) are provided that determine the relative angle between the object and a portion of the robot device and the object.