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发明名称
CHARGE AMOUNT MEASURING DEVICE AND SHIFT AMOUNT MEASURING DEVICE OF CHARGED BEAM
摘要
申请公布号
KR100542509(B1)
申请公布日期
2006.01.11
申请号
KR20040099300
申请日期
2004.11.30
申请人
发明人
分类号
G01N23/22;G01R29/24;H01J37/244;H01J37/28
主分类号
G01N23/22
代理机构
代理人
主权项
地址
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