| 摘要 |
PROBLEM TO BE SOLVED: To attain a high resolution exceeding a resolution limit of an optical projection system. SOLUTION: A 1st contrast increasing layer 3 whose transmissivity varies in accordance with the quantity of light is formed on a resist 2 and 1st projection exposure is carried out. A soln. contg. a contrast increasing agent is supplied to the layer 3, the layer 3 is dissolved and removed and a 2nd contrast increasing layer 3 is formed. Projection exposure is then carried out through a pattern according to a light intensity distribution different from that by the 1st projection exposure. |
