| 摘要 |
The invention includes an EUV optical projection system, comprising: at least six mirrors (M1, M2, M3, M4, M5, M6) for imaging an object (OB) to an image (IM) and wherein an aperture stop (APE) is located along an optical path from said object (OB) to said image (IM) between a first mirror (M1) and a second mirror (M2) and wherein said second mirror (M2) is convex.
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