Method of manufacturing a coating material based on titanium suboxide, a correspondingly manufactured coating material and sputter target provided with the coating material

摘要

Preparation of a Ti-suboxide coating material by:preparation of the Ti-suboxide base material with further processing of this under oxidative conditions resulting in in-situ formation of a finely dispersed Ti-dioxide portion in the ceramic Ti-suboxide base material. Independent claims are included for: (a) a coating material, especially an electrically conductive PVD-coating material obtained as above; (b) a sputter target with a substrate coated with the coating material.