| 摘要 |
A laser material processing apparatus for processing a workpiece ( 22 ) in such a way as to separate one laser light ( 26 ) into two laser beams ( 26 a , 26 b) via first polarizer ( 25 ), one laser beam being passed via the mirrors ( 24 ), the other laser beam being scanned biaxially by a first galvano scanner ( 29 ), and conduct two laser beams ( 26 a , 26 b) to a second polarizer ( 27 ) for scanning via a second galvano scanner ( 30 ), wherein an optical path is constituted such that the laser beam ( 26 b) transmitted through the first polarizer ( 25 ) is reflected by the second polarizer ( 27 ), and the laser beam ( 26 a) reflected by the first polarizer ( 25 ) is transmitted through the second polarizer ( 27 ). |
