发明名称 |
Delivery systems for gases for gases via the sublimation of solid precursors |
摘要 |
A method of depositing a metal or other desired material onto a substrate using a gas generated via the sublimation of solid material precursors, wherein a sold precursor is introduced into a liquid in a bubbler apparatus so that the bubbler then contains vapors of solid precursor, and then sweeping a carrier gas through the bubbler to a reactor containing a substrate which is coated with the precursor via chemical vapor deposition.
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申请公布号 |
US6984415(B2) |
申请公布日期 |
2006.01.10 |
申请号 |
US19990378502 |
申请日期 |
1999.08.20 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
MCFEELY F. READ;NEUMAYER DEBORAH A.;YURKAS JOHN J. |
分类号 |
C23C16/00;C23C16/16;C23C16/448 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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