发明名称 INTERFERENCE METHOD OF MEASUREMENT OF RADIUS OF CURVATURE OF OPTICAL SURFACE
摘要 FIELD: measurement technology. ^ SUBSTANCE: surface to be controlled in placed into interferometer at co-focal position while taking the position as zero reading. Then the controlled surface is displaced twice fro random length and value of displacement of controlled surface is measured by displacement transducer. Number of interference band in interference pattern is registered by means of digital processing of interferogram. Radius of curvature of controlled surface is calculated by means of equation offered in the invention. Value of displacement of controlled item and error in fixation of the item are reduced. ^ EFFECT: improved precision of measurement. ^ 3 dwg
申请公布号 RU2267744(C1) 申请公布日期 2006.01.10
申请号 RU20040118177 申请日期 2004.06.15
申请人 发明人 POLOVTSEV IGOR' GEORGIEVICH;SIMONOVA GALINA VLADIMIROVNA
分类号 G01B11/255 主分类号 G01B11/255
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