发明名称 |
Method and device for controlling ionization |
摘要 |
A device and method for ionization control is provided. The device and method controls the ionization balance using a sensor element, a control circuit that produces output signal as a function of an input signal from the sensor and transmits that output signal to the ionizer being controlled. The device also has a mechanism for detecting rapid changes in the input signal and a mechanism for disabling changes in the control signal for the duration of presence of said rapidly-changing signal.
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申请公布号 |
US6985346(B2) |
申请公布日期 |
2006.01.10 |
申请号 |
US20030434831 |
申请日期 |
2003.05.08 |
申请人 |
CREDENCE TECHNOLOGIES, INC. |
发明人 |
KRAZ VLADIMIR;MARTIN KIRK ALAN |
分类号 |
H01T23/00 |
主分类号 |
H01T23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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