SYSTEM FOR AUTOMATICALLY OPERATING SINGLE WAFER TYPE EQUIPMENT USED IN MANUFACTURING SEMICONDUCTOR AND METHOD USING FOR THE SAME,申请号KR19990024872-传众专利搜索

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发明名称	SYSTEM FOR AUTOMATICALLY OPERATING SINGLE WAFER TYPE EQUIPMENT USED IN MANUFACTURING SEMICONDUCTOR AND METHOD USING FOR THE SAME
摘要
申请公布号	KR100540471(B1)	申请公布日期	2006.01.10
申请号	KR19990024872	申请日期	1999.06.28
申请人		发明人
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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