PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING SYSTEM FOR LOWERING POWER FEED LOSS,申请号KR20040086382-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING SYSTEM FOR LOWERING POWER FEED LOSS
摘要
申请公布号	KR100540612(B1)	申请公布日期	2006.01.10
申请号	KR20040086382	申请日期	2004.10.27
申请人		发明人
分类号	H05H1/26;C23C16/00;C23F1/00;H01J37/32;H05H1/30;H05H1/46	主分类号	H05H1/26
代理机构		代理人
主权项
地址

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