发明名称 Driving means to position a load
摘要 The disclosure provides an apparatus and method for positioning a moveable mass, such as the moveable components found in a typical XY table. The apparatus comprises driving structure producing a driving force to move the mass along an axis, which mass has a variable center of gravity position perpendicular to the axis. The driving force from the driving structure is operative to act through the center of gravity of the mass as the position of the center of gravity changes.
申请公布号 US6983703(B2) 申请公布日期 2006.01.10
申请号 US20020288620 申请日期 2002.11.05
申请人 ASM TECHNOLOGY SINGAPORE PTE LTD 发明人 CHEN WEN;LIAO YOU YONG
分类号 A47B85/00;B23Q1/62;B23Q5/34;B23Q11/00;H01L21/68 主分类号 A47B85/00
代理机构 代理人
主权项
地址