发明名称 |
Method for making a micro-electro-mechanical gyroscope |
摘要 |
A gyroscope comprises a piezoelectric substrate having a surface. Disposed on the surface are a resonator transducer, a pair of reflectors, a structure such as a metallic dot, and a sensor transducer. The resonator transducer creates a first surface acoustic wave on the surface. The pair of reflectors reflects the first surface acoustic wave to form a standing wave within a region of the surface between the pair of reflectors. The structure is disposed on the surface within the region, wherein a Coriolis force acting upon the structure creates a second surface acoustic wave. The sensor senses the second surface acoustic wave and provides an output indicative thereof.
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申请公布号 |
US6984332(B2) |
申请公布日期 |
2006.01.10 |
申请号 |
US20020309566 |
申请日期 |
2002.12.04 |
申请人 |
THE PENN STATE RESEARCH FOUNDATION |
发明人 |
VARADAN VIJAY K.;XAVIER PASCAL B;SUH WILLIAM D.;KOLLAKOMPIL JOSE A;VARADAN VASUNDARA V |
分类号 |
H01L21/00;G01C19/56;G01C19/5698;G01P3/00;G01P9/04;H03H3/08;H03H9/02;H03H9/64 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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