发明名称 Scatterometry by phase sensitive reflectometer
摘要 A phase-sensitive interferometeric broadband reflectometer includes an illumination source for generating an optical beam. A beam splitter or other optical element splits the optical beam into probe beam and reference beam portions. The probe beam is reflected by a subject under test and then rejoined with the reference beam. The combination of the two beams creates an interference pattern that may be modulated by changing the length of the path traveled by the probe or reference beams. The combined beam is received and analyzed by a spectrometer.
申请公布号 US6985232(B2) 申请公布日期 2006.01.10
申请号 US20030387772 申请日期 2003.03.13
申请人 TOKYO ELECTRON LIMITED 发明人 SEZGINER ABDURRAHMAN
分类号 G01B9/02;G01J3/453 主分类号 G01B9/02
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