MEASURING APPARATUS OF PARTICLE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT AND MEASURING METHOD THEREOF,申请号KR20040051113-传众专利搜索

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发明名称	MEASURING APPARATUS OF PARTICLE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT AND MEASURING METHOD THEREOF
摘要
申请公布号	KR20060002177(A)	申请公布日期	2006.01.09
申请号	KR20040051113	申请日期	2004.07.01
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KANG, SANG WOO
分类号	H01L21/66;G01N21/94	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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