APPARATUS FOR PROCESSING A SEMI-CONDUCTOR SUBSTRATE,申请号KR20040049207-传众专利搜索

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发明名称	APPARATUS FOR PROCESSING A SEMI-CONDUCTOR SUBSTRATE
摘要
申请公布号	KR20060000375(A)	申请公布日期	2006.01.06
申请号	KR20040049207	申请日期	2004.06.29
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	JEON, YU TAEK
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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