发明名称 High integrity protective coatings
摘要 A composite article with at least one high integrity protective coating, the high integrity protective coating having at least one planarizing layer and at least one organic-inorganic composition barrier coating layer. A method for depositing a high integrity protective coating.
申请公布号 US2006001040(A1) 申请公布日期 2006.01.05
申请号 US20040988481 申请日期 2004.11.15
申请人 GENERAL ELECTRIC COMPANY 发明人 KIM TAE W.;YAN MIN;HELLER CHRISTIAN M.A.;SCHAEPKENS MARC;GORCZYCA THOMAS B.;MC CONNELEE PAUL A.;ERLAT AHMET G.
分类号 H01L29/24;H01L21/44 主分类号 H01L29/24
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