| 摘要 |
<p>A carrier support device (10) supporting a carrier (C) horizontally storing a plurality of roughly flat plate-shaped treated bodies (D) at intervals in the vertical direction. The carrier comprises multiple sets of support stages (lower surfaces of grooves (1A)) formed at intervals in the vertical direction, and is formed so that the set of each support stage supports the bottom face edge part of one treated body (D). The carrier support device comprises a loading table (11) for loading the carrier (C) thereon, a raising member (12) installed liftably relative to the loading table, and a drive mechanism drivingly lifting the raising member. The raising member (12) pushes up, in rising, the bottom face of the treated body (D) supported by the set of the lowermost support stage of the carrier (C) to raise the treated body from the support stage.</p> |
