| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of substrateless filter capable of manufacturing a substrateless filter without limitation of the size. SOLUTION: A strippable layer 20 comprising fullerene is formed on a glass substrate 10. Subsequently, a multilayer 30 is formed on the strippable layer 20 according to sputtering. Thereafter, a glass substrate 10 on which the multilayer film 30 is formed via the strippable layer 20 is heated at 400°C in vacuum for 2 hr. As a result, the fullerene forming the strippable layer 20 is sublimated and the multilayer film 30 is separated from the substrate 10. COPYRIGHT: (C)2006,JPO&NCIPI
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