A probe suitable for probing a semiconductor wafer that includes an active circuit (16). The probe may include a flexible interconnection (14) between the active circuit (16) and a support structure (10). The probe may impose a relatively low capacitance on the device under test.
申请公布号
WO2005065258(A3)
申请公布日期
2006.01.05
申请号
WO2004US43231
申请日期
2004.12.21
申请人
CASCADE MICROTECH, INC.;STRID, ERIC;GLEASON, K., REED
