| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a humidification control device capable of obtaining a gas of desired humidification amount by eliminating the ununiformity of temperature distribution in a container. <P>SOLUTION: The humidification control device has a container in which a gas phase portion and a liquid phase portion exist by storing water, a gas supply port for supplying gas in the liquid phase portion, and a gas exhaust port for exhausting gas from the gas phase portion. The humidification control device also has a water temperature adjusting means for changing the temperature of the liquid phase and a water circulation means for circulating water using a circulation passage between the liquid phase portion and the gas phase portion. Since the water circulation means circulates the water changed in temperature by the water temperature adjusting means to the gas phase portion, heat exchange is carried out between the liquid phase portion and the gas phase portion. Thereby, the delay of the temperature change of the gas phase portion against the temperature change of the liquid phase portion is reduced. Therefore, gas established to a desired humidification amount can be obtained immediately. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
