| 摘要 |
PROBLEM TO BE SOLVED: To overcome the occurrence of a high residual stress on an intersection of an extraction electrode for an internal electrode of a ceramic element such as an electrostatic chuck and the occurrence of a crack or the like when the ceramic element is reduced in thickness, the residual stress occurring due to a difference in thermal expansion coefficient and a difference in thermal contraction during burning between the ceramic element and a metallized layer of an electrode part. SOLUTION: The ceramic element has the internal electrode of a thin film which is almost in parallel with an external active surface of adsorption or the like. The internal electrode comprises the extraction electrode of a conductor thin film, a part of which extends into the ceramic element from the opposite side of the active surface and is connected like a corner joint along the edge of the internal electrode, and the other end on the opposite side is exposed on the position of an external terminal on an end face of the ceramic element. COPYRIGHT: (C)2006,JPO&NCIPI |
