发明名称 SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a thin semiconductor device which can prevent deterioration in the reliability by a heavy metal contamination in a sealing step with a resin, etc. SOLUTION: The semiconductor device has a semiconductor integrated circuit in an upper part; and a semiconductor substrate 1, formed in advance in an interior with a minute defective layer 2, is thinned from the rear surface of the substrate by 150μm or smaller in thickness, so that it may leave minute defective layer 2. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006005063(A) 申请公布日期 2006.01.05
申请号 JP20040178205 申请日期 2004.06.16
申请人 SHARP CORP 发明人 ARIMURA KIMIHARU
分类号 H01L21/322;H01L21/02;H01L29/32 主分类号 H01L21/322
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