| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion beam drawing electrode and an ion injection device which have a long life. SOLUTION: The ion injection device 1 is provided with the drawing electrode 20. The drawing electrode 20 has a ground electrode 21 and an acceleration and deceleration electrode 22. The ground electrode 21 which is an electrode to which a ground electrical potential is given is constituted of having the ground electrode 21a (first ground electrode) and the ground electrode 21b (second ground electrode). The material of the ground electrode 21a is stainless steel (SUS 304). The ground electrode 21b is installed on the upper stream side of the ion beam B than that of the ground electrode 21a, and its material is carbon. The acceleration and deceleration electrode 22 is the electrode in which a negative electric potential is given to the ground electric potential, and which is installed on the upper stream side of the ion beam B against the ground electrode 21. COPYRIGHT: (C)2006,JPO&NCIPI
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