| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact vacuum film-forming device in which the atmosphere in the film-forming chamber can be decompressed rapidly by making the volume of the film-forming chamber small, a manufacturing method of a thin film element, and an electronic equipment. SOLUTION: The film-forming device comprises a gate valve GB at each of the first to third evaporation source chambers 3A-3C for making it independent from the substrate transfer chamber 2. Furthermore, an intake and exhaust port 12 is provided at each of the first to third evaporation source chambers 3A-3C, and from it it is connected to a vacuum pump which decompresses or controls to atmospheric pressure the atmosphere in each of the first to third evaporation source chambers 3A-3C individually through the piping. COPYRIGHT: (C)2006,JPO&NCIPI
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