发明名称 MANUFACTURING METHOD OF NOZZLE PLATE, LIQUID-DROPLET DISCHARGING HEAD AND LIQUID-DROPLET DISCHARGING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a nozzle-plate manufacturing method which enables the simplification of a nozzle-plate manufacturing process and formation of a finer irregularity at a low cost, a liquid-droplet discharging head and a liquid-droplet discharging device. SOLUTION: The nozzle-plate manufacturing method by which a minute irregularity is formed around a nozzle hole for discharging the liquid droplet has a first process by which a mask 205 of the almost same pattern as a projection of the above irregularity is formed on the surface of a substrate 105 using a die 202A with the projection 202A1 corresponding to the projection or a recess of the above irregularity and a second process by which the minute irregularity is formed on the surface of the substrate 105 by etching the substrate 105 using the mask 205. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006001215(A) 申请公布日期 2006.01.05
申请号 JP20040181864 申请日期 2004.06.18
申请人 SEIKO EPSON CORP 发明人 OTANI KAZUFUMI;FUJII MASAHIRO;MURATA AKIHIRO
分类号 B41J2/135;B41J2/16 主分类号 B41J2/135
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