| 摘要 |
PROBLEM TO BE SOLVED: To significantly upgrade the adhesive strength of a metal and a plastic film in forming a metallic film on the plastic film while curbing an increase in a manufacturing cost to a maximum possible extent by a gas phase process for sputtering or vapor deposition. SOLUTION: The surface of a base material is roughened (110), a polyimide precursor is applied to the roughened surface of the base material (103), imidated by heating (104), and thus a rough film 110 with a roughened surface (not less than 0.05μm Rms) corresponding to the roughened surface of the base material, is obtained. Next, the rough film 110 which is released from the base material, is stored in a vacuum chamber, the metallic film is formed on the roughened surface by a Cr sputtering process (122) and a Cu sputtering process (123) in that order, and further, copper is plated on the metallic film to obtain the metal-coated substrate 130. COPYRIGHT: (C)2006,JPO&NCIPI
|
