| 摘要 |
PROBLEM TO BE SOLVED: To provide an appearance inspection device capable of inspecting surely the appearance of an inspection object. SOLUTION: A first base 11 has the first truncated cone surface 17 finished into a mirror surface, and a cylindrical hole 18 is formed along the center axis of a first truncated cone surface 17 in the first base 11. A second base 12 is arranged concentrically with the first truncated cone surface 17 in the hole 18. The tip part of the second base 12 has a truncated cone shape, and has the second truncated cone surface 21 finished into a mirror surface. The whole periphery of the edge of outer and inner peripheries of the inspection object 7 is arranged in the abutting state on the first truncated cone surface 17 and a second truncated cone surface 21. In an illuminator 16, a plurality of light sources 19 are arrayed on the circumference, and directly irradiate light toward the upper surface 7a, the outer peripheral surface 7b and the inner peripheral surface 7c of the inspection object 7. The inspection object 7 is imaged by a camera 6 in this state. COPYRIGHT: (C)2006,JPO&NCIPI
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