| 摘要 |
PROBLEM TO BE SOLVED: To carry to an arbitrary place such as a production site to perform accurate measurement, and to further reduce a price than a conventional measurement device, in a non-contact shape measurement device. SOLUTION: In this non-contact shape measurement device 1, a mobile measurement device 3 is fixed to a steel surface plate 2 by three magnets installed to a bottom part 12, a minute uneven pattern attached to the surface of the surface plate 2 is imaged by two image sensors 11A, 11B, two imaged screens are instantaneously compared and collated with all data on the uneven pattern stored in a memory of a personal computer, and an according pattern inside registration data is searched for to calculate coordinates of an imaging center point A and point B with extremely high accuracy. Thereby, data on product shape measured by irradiating visible laser light condensed to a narrow beam from a measurement part (a display sensor) 7 onto a product W can be also obtained with high accuracy, the non-contact shape measurement device 1 can be carried to the optional place such as the production site to perform the accurate measurement, and can allow the further reduction of the price than the conventional measurement device. COPYRIGHT: (C)2006,JPO&NCIPI
|
