LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

The joint between the lens (21) and its support (22) comprises an inorganic layer or a direct bond and is thus liquid tight which prevents deformation by the immersion liquid. The joint can be made either warm or cold. Solders, glue, and glue protection can all be used in the formation of this joint. The lens (21) and its support (22) are preferably made of quartz.