METHOD FOR FORMING PATTERN, AND TFT ARRAY SUBSTRATE, AND LIQUID CRYSTAL DISPLAY ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a pattern suitable for the manufacture of a liquid crystal display (LCD) or a plasma display (PDP) for a large screen, and to provide a TFT array substrate and a liquid crystal display element.

SOLUTION: The method includes: a positive photosensitive layer forming step to form at least a positive photosensitive layer on the surface of a substrate by using a positive photosensitive composition; an exposure step to expose the positive photosensitive layer to light from a light irradiating means, the light modulated by a light modulating means having n of drawing elements which receive the light from the light irradiating means and exit the light and then made to pass a microlens array having arrangement of microlenses having aspheric surfaces which can correct aberration due to the exiting faces of the drawing elements; and a developing step to develop the positive photosensitive layer exposed in the exposure step.

COPYRIGHT: (C)2006,JPO&NCIPI