| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermostatic rotary carrying device capable of accurately adjusting a temperature. SOLUTION: This thermostatic rotary carrying device 1 is equipped with a rotary table 2 for carrying a component while being rotated, a driving motor 6 for generating power for driving the rotary table, a rotational driving part 3 for rotationally driving the rotary table, a timing belt 5 provided between the driving motor 6 and the rotational driving part 3 and constituting a drive transmitting part for transmitting the rotating force of the driving motor 6 to the rotational driving part 3, a first temperature control device 7 for controlling the temperature of the rotary table 2, and a second temperature control device 8 for controlling the temperature of the drive transmitting part. The driving motor 6 and the rotational driving part 3 are arranged in such a manner of being separated from each other. COPYRIGHT: (C)2006,JPO&NCIPI
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